Nonvolatile semiconductor memory device and method for manufacturing same

ABSTRACT

According to one embodiment, a nonvolatile semiconductor memory device includes a plurality of U-shaped memory strings, each of the plurality of U-shaped memory strings including a first columnar body, a second columnar body, and a conductive connection body. The conductive connection body connects the first columnar body and the second columnar body. A plurality of first memory cells are connected in series in the first columnar body and are composed of a plurality of first conductive layers, a first inter-gate insulating film, a plurality of first floating electrodes, a first tunnel insulating film, and a first memory channel layer. The plurality of first floating electrodes are separated from the plurality of first conductive layers by the first inter-gate insulating film. A plurality of second memory cells are connected in series in the second columnar body, similarly to the plurality of first memory cells.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of and claims the benefit of priorityunder 35 U.S.C. § 120 from U.S. application Ser. No. 15/014,112 filedFeb. 3, 2016, which is a continuation of U.S. application Ser. No.13/780,150 filed Feb. 28, 2013 (now U.S. Pat. No. 9,287,388 issued Mar.15, 2016), and claims the benefit of priority under 35 U.S.C. § 119 fromJapanese Patent Application No. 2012-089421 filed Apr. 10, 2012; theentire contents of each of which are incorporated herein by reference.

FIELD

Embodiments described herein relate generally to a nonvolatilesemiconductor memory device and a method for manufacturing the same.

BACKGROUND

A NAND nonvolatile semiconductor memory device is proposed that includesa plurality of memory cells connected in series in the stackingdirection of a stacked body by a configuration in which a firstinsulating film, a charge storage layer, a second insulating film, and achannel layer are formed in a memory hole penetrating through thestacked body in which conductive layers and interlayer insulating filmsare alternately stacked. The nonvolatile semiconductor memory deviceincludes memory cells three-dimensionally, and is therefore expected toenable increasing the bit density and reducing production costs. In thenonvolatile semiconductor memory device, the memory cell is a transistorcomposed of the conductive layer of the stacked body and the firstinsulating film, the charge storage layer, the second insulating film,and the channel layer in the memory hole. The conductive layer of thestacked body functions as a control gate. Electrons can be injected fromthe channel layer into the charge storage layer by increasing thevoltage of the control gate. When electrons exist in the charge storagelayer, the threshold of the memory cell is increased. The threshold ofthe memory cell is changed by the presence or absence of electrons inthe charge storage layer. Utilizing this, the memory cell functions asone memory of the semiconductor memory device. The charge storage layeris formed of a material that traps electrons, such as silicon nitride.Although memory cells adjacent in the stacking direction of the stackedbody are connected to each other by the charge storage layer, electronsare trapped in a portion of the charge storage layer opposed to theconductive layer of each memory cell. Thus, electrons are retained inunits of a memory cell. The nonvolatile semiconductor memory device inwhich a charge is thus retained in the charge storage layer in units ofa memory cell to perform memory storage operation is a charge storagenonvolatile semiconductor memory device. In the charge storagenonvolatile semiconductor memory device, electrons trapped in the chargestorage layer in each memory cell may leak through the charge storagelayer into an adjacent memory cell, and the threshold of the memory cellvaries. That is, the charge retention properties of the memory cell arenot good. Furthermore, when erasing the record of the memory cell, holesare injected from the channel layer into the charge storage layer bybeing made to tunnel through the second insulating film. Therefore, thedeterioration of the second insulating film is accelerated. This furtheraccelerates the degradation of the charge retention ability of thememory cell. Furthermore, since the density of electrons stored in thecharge storage layer cannot be increased, the range of the threshold ofthe memory cell is narrow. Therefore, it is difficult to enablemultiple-valued operation of the memory cell.

In contrast, a floating gate nonvolatile semiconductor memory deviceincludes a floating electrode formed of a conductive layer of conductivesilicon or the like in place of the charge storage layer mentionedabove. The floating electrode is insulated from an adjacent memory cellby an interlayer insulating film. The memory cell of the floating gatenonvolatile semiconductor memory device (hereinafter, a “floatinggate-type memory cell”) is, similarly to the memory cell of the chargestorage nonvolatile semiconductor memory device (hereinafter, a “chargestorage-type memory cell”), composed of a first conductive layer, afirst insulating film, a second conductive layer, a second insulatingfilm, and a channel layer. Here, the first conductive layer functions asa control gate. The second conductive layer functions as a floatingelectrode (a floating gate). The floating electrode is, unlike the caseof the charge storage-type memory cell, insulated from the floatingelectrode of an adjacent memory cell by an interlayer insulating film.In the floating gate nonvolatile semiconductor memory device, similarlyto the charge storage nonvolatile semiconductor memory device, electronsare stored in the floating electrode of the memory cell to change thethreshold of the memory cell, and this is used for memory storageoperation. In the floating gate nonvolatile semiconductor memory device,since the floating electrode is a conductor, the electron density can beincreased. Therefore, the range of the threshold of the memory cell iswide, and this is preferable for enabling multiple-valued operation ofthe memory cell. Furthermore, the floating electrode is insulated fromthe floating electrode of an adjacent memory cell by the interlayerinsulating film. Therefore, the leakage of electrons from the floatingelectrode is suppressed, and the charge retention ability of thefloating gate-type memory cell is high as compared to the chargeretention ability of the charge storage-type memory cell. Furthermore,in the erasing of the record of the memory cell, electrons are releasedfrom the floating electrode to the channel layer by being made to tunnelthrough the second insulating film. Therefore, the deterioration of thesecond insulating film can be suppressed as compared to the case whereholes are made to tunnel. Thereby, the leakage of electrons from thefloating electrode via the second insulating film is further suppressed.Thus, the charge retention ability of the floating gate-type memory cellis further improved as compared to that of the charge storage-typememory cell.

As described above, the floating gate-type memory cell has higher chargeretention ability and is more suitable for enabling multiple-valuedoperation than the charge storage-type memory cell. Therefore, it isdesired for floating gate-type memory cells to be formed along a memoryhole penetrating through a stacked body in which conductive layers andinterlayer insulating films are alternately stacked. However, in thecase of manufacturing a nonvolatile semiconductor memory device thatincludes a floating electrode in a portion opposed to each conductivelayer of a memory hole penetrating through the stacked body mentionedabove and includes an interlayer insulating film between floatingelectrodes adjacent in the stacking direction, the manufacturingprocesses have been complicated and the manufacturing costs have beenhigh. Furthermore, it is necessary to form a back gate transistor inorder that adjacent columnar bodies in which a plurality of memory cellsare connected may be connected on the substrate side. Thus, thestructure is complicated and also this has been a factor in increasingmanufacturing costs. A nonvolatile semiconductor memory device isdesired that includes a plurality of floating gate-type memory cellsformed along a memory hole penetrating through a stacked body in whichconductive layers and interlayer insulating films are alternatelystacked, can be manufactured by easy manufacturing processes, and has ahigh bit density and high charge retention ability.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic perspective view of a main portion of a memorycell array of a nonvolatile semiconductor memory device according to afirst embodiment.

FIG. 2 is an equivalent circuit of the main portion shown in FIG. 1.

FIG. 3 is a cross-sectional view of the main portion as viewed from theX direction in the perspective view of FIG. 1.

FIG. 4 is a plan view taken along line A-A of FIG. 3.

FIG. 5 to FIG. 13 are schematic cross-sectional views of a main portionshowing part of the manufacturing processes of the nonvolatilesemiconductor memory device according to the first embodiment.

FIG. 14 is a schematic cross-sectional view of a main portion of anonvolatile semiconductor memory device according to a secondembodiment, and is a cross-sectional view as viewed from the X directionin the perspective view of FIG. 1.

FIG. 15 to FIG. 17 are schematic cross-sectional views of a main portionshowing part of the manufacturing processes of the nonvolatilesemiconductor memory device according to the second embodiment.

FIG. 18 is a schematic cross-sectional view of a main portion of anonvolatile semiconductor memory device according to a third embodiment,and is a cross-sectional view as viewed from the X direction in theperspective view of FIG. 1.

FIG. 19 to FIG. 20 are schematic cross-sectional views of a main portionshowing part of the manufacturing processes of the nonvolatilesemiconductor memory device according to the third embodiment.

DETAILED DESCRIPTION

According to one embodiment, a nonvolatile semiconductor memory deviceincludes a plurality of U-shaped memory strings, each of the pluralityof U-shaped memory strings including a first columnar body, a secondcolumnar body, a conductive connection body, a first select transistor,and a second select transistor. The first columnar body is provided on asubstrate. A plurality of first memory cells are connected in series inthe first columnar body along a first direction perpendicular to thesubstrate. The second columnar body is provided on the substrate to beadjacent to the first columnar body in a second direction perpendicularto the first direction. A plurality of second memory cells are connectedin series in the second columnar body along the first direction. Theconductive connection body extends along the second direction andconnects one end on the substrate side of the first columnar body andone end on the substrate side of the second columnar body at both ends.The first select transistor includes a first channel layer of whichconduction and non-conduction are controlled by a first select gateelectrode. One end of the first channel layer is connected to anotherend of the first columnar body on an opposite side to the one end. Thesecond select transistor includes a second channel layer of whichconduction and non-conduction are controlled by a second select gateelectrode. One end of the second channel layer is connected to anotherend of the second columnar body on an opposite side to the one end. Theplurality of U-shaped memory strings are arranged along a thirddirection perpendicular to the first and second directions. Theconnection body is provided in an insulating layer provided on thesubstrate. The first columnar body includes a first stacked bodyprovided on the substrate, a first tunnel insulating film in a tubularshape, a first memory channel layer in a tubular shape made of asemiconductor, a first core member, a first inter-gate insulating filmin a tubular shape, and a plurality of first floating electrodes. Thefirst stacked body includes a plurality of first conductive layers and aplurality of first interlayer insulating films formed by alternatelystacking a first conductive layer and a first interlayer insulating filmand extends in the third direction. The first tunnel insulating film isprovided on an entire side wall of a first memory hole penetratingthrough the first stacked body and reaching the connection body and isconnected to the connection body. The first memory channel layer isprovided on an entire side wall of the first memory hole via the firsttunnel insulating film, is electrically connected to the connection bodyat the one end of the first columnar body, and is electrically connectedto the one end of the channel layer of the first select transistor atthe other end of the first columnar body. The first core member isprovided inside the first memory channel layer. The first inter-gateinsulating film penetrates through the first stacked body and includesthe first tunnel insulating film in a tubular shape on an inside. Theplurality of first floating electrodes are separated from the pluralityof first conductive layers by the first inter-gate insulating film andare insulated from surroundings by the first inter-gate insulating film,the first tunnel insulating film, and the plurality of first interlayerinsulating films. The plurality of first memory cells are composed ofthe plurality of first conductive layers, the first inter-gateinsulating film, the plurality of first floating electrodes, the firsttunnel insulating film, and the first memory channel layer. The secondcolumnar body includes a second stacked body provided on the substrate,a second tunnel insulating film in a tubular shape, a second memorychannel layer in a tubular shape made of a semiconductor, a second coremember, a second inter-gate insulating film in a tubular shape, and aplurality of second floating electrodes. The second stacked bodyincludes a plurality of second conductive layers and a plurality ofsecond interlayer insulating films formed by alternately stacking asecond conductive layer and a second interlayer insulating film andextends in the third direction. The second tunnel insulating film isprovided on an entire side wall of a second memory hole penetratingthrough the second stacked body and reaching the connection body and isconnected to the connection body. The second memory channel layer isprovided on an entire side wall of the second memory hole via the secondtunnel insulating film, is electrically connected to the connection bodyat the one end of the second columnar body, and is electricallyconnected to the one end of the channel layer of the second selecttransistor at the other end of the second columnar body. The second coremember is provided inside the second memory channel layer. The secondinter-gate insulating film penetrates through the second stacked bodyand includes the second tunnel insulating film in a tubular shape on aninside. The plurality of second floating electrodes are separated fromthe plurality of second conductive layers by the second inter-gateinsulating film and are insulated from surroundings by the secondinter-gate insulating film, the second tunnel insulating film, and theplurality of second interlayer insulating films. The plurality of secondmemory cells are composed of the plurality of second conductive layers,the second inter-gate insulating film, the plurality of second floatingelectrodes, the second tunnel insulating film, and the second memorychannel layer.

Hereinbelow, embodiments of the invention are described with referenceto the drawings. The drawings used in the description of the embodimentsare schematic ones for easier description; and in the actual practice,the configurations, dimensions, magnitude relationships, etc. of thecomponents in the drawings are not necessarily the same as thoseillustrated in the drawings and may be appropriately altered to theextent that the effect of the invention is obtained.

First Embodiment

A nonvolatile semiconductor memory device that is a floating gate NANDflash memory according to a first embodiment of the invention will nowbe described using FIG. 1 to FIG. 4. FIG. 1 is a schematic perspectiveview of a main portion of a memory cell array of the nonvolatilesemiconductor memory device according to the first embodiment. In FIG.1, the illustration of interlayer insulating films provided among wordlines WL1 to WL8, drain-side select gate lines SGD, source-side selectgate lines SGS, bit lines BL, source lines SL, and an insulating film 1is omitted for easier description. FIG. 2 is an equivalent circuit ofthe main portion shown in FIG. 1. FIG. 3 is a cross-sectional view of amain portion as viewed from the X direction in the perspective view ofFIG. 1. FIG. 4 is a plan view taken along line A-A of FIG. 3. FIG. 3 isa cross section taken along line B-B in FIG. 4.

As shown in FIG. 1 and FIG. 2, the nonvolatile semiconductor memorydevice according to the embodiment includes a U-shaped memory string MSas a unit cell in a memory cell array portion on a not-shown substrate.The memory string MS is arranged in plural along the X direction in thedrawing parallel to the major surface of the not-shown substrate, andthe plurality of memory strings MS constitute a memory block MB. Thememory block MB is provided in plural in the Y direction perpendicularto the X direction in a plane parallel to the major surface of thenot-shown substrate.

The memory string MS includes a first columnar body MS1, a secondcolumnar body MS2, a connection body 2, a drain-side select transistorSDTr, and a source-side select transistor SSTr. The first columnar bodyhas a configuration in which a plurality of memory transistors MTr1 toMTr4 are connected in series along the Z direction (the stackingdirection) perpendicular to the X direction and the Y direction. Thememory transistors MTr1 to MTr4 are memory cells in which a record canbe written, read, and erased by word lines WL1 to WL4. The secondcolumnar body MS2 has, similarly to the first columnar body MS1, aconfiguration in which a plurality of memory transistors MTr5 to MTr8are connected in series along the Z direction. The memory transistorsMTr5 to MTr8 are memory cells in which a record can be written, read,and erased by word lines WL5 to WL8. The second columnar body MS2 isadjacent to the first columnar body MS1 in the Y direction.

The first columnar body MS1 and the second columnar body MS2 areconnected by the conductive connection body 2 on the substrate side.That is, one end of the connection body 2 extending in the Y directionis connected to one end on the substrate side of the first columnar bodyMS1. The other end of the connection body 2 is connected to one end onthe substrate side of the second columnar body MS2.

The other end of the first columnar body MS1 on the opposite side to thesubstrate is connected to one end of a channel layer of the drain-sideselect transistor SDTr. In the drain-side select transistor SDTr, theconduction and non-conduction of the channel layer are controlled by adrain-side select gate line SGD. The other end of the second columnarbody MS2 on the opposite side to the substrate is connected to one endof a channel layer of the source-side select transistor SSTr. In thesource-side select transistor SSTr, the conduction and non-conduction ofthe channel layer are controlled by a source-side select gate line SGS.

In the embodiment, the first columnar body MS1 and the second columnarbody MS2 each include four memory cells connected in series. Further,the first columnar body MS1 and the second columnar body MS2 areconnected in series by the connection body 2. Therefore, one memorystring MS has information of 8 bits. The above is an example, and thenumber of memory cells connected in series of the first columnar bodyMS1 and the second columnar body MS2 may be arbitrarily selected inaccordance with the number of stacked word line layers WL describedlater.

In the memory block MB, the memory transistors MTr1 of the plurality offirst columnar bodies MS1 aligned along the X direction include thecommon word line WL1. Similarly, also the other memory transistors MTr2to MTr4 include the common word lines WL2 to WL4, respectively, in thememory block MB. The word lines WL1 to WL4 are stacked via interlayerinsulating films 3, and form a first stacked body. The first stackedbody extends along the X direction.

Similarly, the memory transistors MTr5 to MTr8 of the plurality ofsecond columnar bodies MS2 aligned along the X direction have the commonword lines WL5 to WL8, respectively. The word lines WL5 to WL8 arestacked via the interlayer insulating films 3, and form a second stackedbody. The second stacked body extends along the X direction.

Similarly, the plurality of drain-side select transistors SDTr alignedalong the X direction include the common drain-side select gate SGD. Thedrain-side select gate line SGD is provided to extend along the Xdirection on the uppermost word line WL1 of the first stacked body via anot-shown interlayer insulating film.

Similarly, the plurality of source-side select transistors SSTr alignedalong the X direction include the common source-side select gate lineSGS. The source-side select gate line SGS is provided to extend alongthe X direction on the uppermost word line WL8 of the second stackedbody via a not-shown interlayer insulating film.

The other ends of the channel layers of the plurality of drain-sideselect transistors SDTr in one memory block MB are each electricallyconnected to one bit line BL. Each bit line extends in the Y direction,and is similarly electrically connected to by also the other end of thechannel layer of the drain-side select transistor SDTr of a memorystring MS in the other memory block(s) MB. That is, each bit lineelectrically connects the other ends of the channel layers of drain-sideselect transistors of memory blocks adjacent in the Y direction.

All of the other ends of the channel layers of the plurality ofsource-side select transistors SSTr in one memory block MB areelectrically connected to one source line SL. The source line SL extendsin the X direction along the second stacked body.

Thus, the memory string MS serves as a unit cell, and forms a memorycell array. The selection of a memory cell in the memory cell array isperformed as follows. A memory string MS in a portion where a selecteddrain-side select gate line SGD and a selected bit line BL intersect isselected. Further, by selecting an arbitrary word line from among theword lines WL1 to WL8, a memory cell in the memory string MS isselected.

Next, a specific cross-sectional structure of the memory string MS isdescribed in detail using FIG. 3 and FIG. 4. FIG. 3 is a cross-sectionalview of the first columnar body MS1 and the second columnar body MS2 ofthe memory string MS as viewed from the X direction. FIG. 4 is a planview taken along line A-A of FIG. 3, and is a plan view of the firstcolumnar body MS1 and the second columnar body MS2 of the memory stringMS.

An insulating layer 1 is provided on a not-shown substrate. Theinsulating layer 1 may be an insulator, and silicon oxide, for example,is used. Also silicon nitride may be used. The conductive connectionbody 2 is provided in the insulating layer 1. The connection body 2 isformed of, for example, n-type silicon. The connection body 2 may beeither n-type silicon or p-type silicon, and is preferably the sameconductivity type as the conductivity type of the channel of the memorytransistor. That is, in the case where the memory transistor has an nchannel, the connection body 2 is preferably n-type silicon. Examples ofthe silicon include polysilicon, amorphous silicon, partiallycrystallized silicon, and the like (the same applies hereinafter). Theconnection body 2 may be formed of a conductor containing silicon. Otherthan a conductor containing silicon, also TaN, TiN, and a metal such asW, Mo, and Ta may be used. Furthermore, a metal silicide of siliconbased on Ni, Co, Fe, or the like commonly used may be used.

A stacked body composed of a plurality of word line layers WL and aplurality of interlayer insulating films 3 in which the conductive wordline layers WL (conductive layers) and the interlayer insulating films 3are alternately stacked is provided on the connection body 2. Thestacked body is divided by an isolation trench that divides all of theplurality of word line layers WL, and the first stacked body and thesecond stacked body are provided. Thereby, the first stacked bodyincludes a plurality of first word lines WL1 to WL4 (first conductivelayers) divided from the plurality of word line layers WL and aplurality of first interlayer insulating films 3 divided from theplurality of interlayer insulating films 3. Similarly, the secondstacked body includes a plurality of second word lines WL5 to WL8(second conductive layers) divided from the plurality of word linelayers WL and a plurality of second interlayer insulating films 3divided from the plurality of interlayer insulating films 3. The firststacked body and the second stacked body extend along the X direction.

The plurality of word line layers WL may be a conductive material, andare formed of, for example, n-type silicon. Also p-type silicon may beused. The plurality of word line layers WL may be formed of a conductorcontaining silicon. Other than a conductor containing silicon, a metalsilicide may be used. Furthermore, TaN, TiN, and a metal such as W, Mo,and Ta may be used. The plurality of interlayer insulating films 3 are,for example, silicon oxide, but also silicon nitride may be used. Theword line layer WL and the interlayer insulating film 3 each have athickness of, for example, 50 nm.

A first memory hole MH1 that penetrates through the first stacked bodyand reaches one end in the Y direction of the connection body 2 isprovided. The diameter of the first memory hole MH1 is, for example, 40nm. The first memory hole MH1 is provided in plural along the Xdirection in the first stacked body. A first tunnel insulating film 4 ais provided on the entire side wall of the first memory hole MH1, andhas a tubular structure with a thickness of 7 nm. The first tunnelinsulating film 4 a is formed of, for example, silicon oxide, but may beformed of silicon nitride.

A first memory channel layer 5 a is provided on the entire side wall ofthe first memory hole MH1 via the first tunnel insulating film 4 a, andhas a tubular structure made of a semiconductor with a thickness of 8nm. The first memory channel layer 5 a is formed of, for example,silicon. The first memory channel layer 5 a may be formed of asemiconductor containing silicon. The first memory channel layer 5 a iselectrically connected to the connection body 2. A first core member isprovided so as to fill the hollow portion inside the first memorychannel layer 5 a. The first core member is formed of, for example,silicon oxide and has a circular columnar structure with a diameter of10 nm. The core member may be made of any material that can fill thehollow portion, and silicon nitride may be used as well as siliconoxide. Alternatively, the same material as the first memory channellayer 5 a is possible. Furthermore, the hollow portion may be as it iswith no member provided.

A first inter-gate insulating film 8 a in tubular shape penetratingthrough all of the plurality of first word lines in the first stackedbody is provided so as to include the tubular first tunnel insulatingfilm 4 a on the inside. The first inter-gate insulating film 8 a has athickness of, for example, 10 nm, and is formed of silicon oxide.Silicon nitride may be used instead of silicon oxide. The firstinter-gate insulating film 8 a divides the plurality of word lines WL1to WL4 in the first stacked body. Thereby, a plurality of first floatingelectrodes FG1 to FG4 in a ring shape are provided along the Z directionbetween the first inter-gate insulating film 8 a and the first tunnelinsulating film 4 a. Each of the first floating electrodes FG1 to FG4 iscompletely insulated from the surroundings by the first tunnelinsulating film 4 a, the over- and underlying first interlayerinsulating films 3, and the first inter-gate insulating film 8 a.

The first word line WL1, the first inter-gate insulating film 8 a, thefirst floating electrode FG1, the first tunnel insulating film 4 a, andthe first memory channel layer 5 a constitute a first memory transistorMTr1. The first word line WL1 functions as a control gate. The firstfloating electrode FG1 functions as a floating gate. Electrons areinjected from the first memory channel layer 5 a into the first floatingelectrode FG1 and are retained therein; thereby, the first memorytransistor MTr1 functions as a memory cell having memory storageoperation. Similarly, the other first word lines WL2 to WL4, the firstinter-gate insulating film 8 a, the other first floating electrodes FG2to FG4, the first tunnel insulating film 4 a, and the first memorychannel layer 5 a constitute other first memory transistors MTr2 toMTr4. The memory transistors MTr2 to MTr4 function as memory cells. Theplurality of first memory transistors MTr1 to MTr4 are connected inseries by the first stacked body, the first tunnel insulating film 4 a,and the first memory channel layer 5 a, and constitute the firstcolumnar body MS1.

A second memory hole MH2 that penetrates through the second stacked bodyand reaches the other end in the Y direction of the connection body 2 isprovided. The diameter of the second memory hole MH2 is 40 nm similarlyto the first memory hole MH1. The second memory hole MH2 is adjacent tothe first memory hole MH1, and is provided in plural along the Xdirection in the second stacked body. A second tunnel insulating film 4b is provided on the entire side wall of the second memory hole MH2, andhas a tubular structure with a thickness of 7 nm similarly to the firsttunnel insulating film 4 a. The second tunnel insulating film 4 b isformed of silicon oxide similarly to the first tunnel insulating film 4a, but may be formed of silicon nitride.

A second memory channel layer 5 b is, similarly to the first memorychannel layer 5 a, provided on the entire side wall of the second memoryhole MH2 via the second tunnel insulating film 4 b, and has a tubularstructure made of silicon with a thickness of 8 nm. The second memorychannel layer 5 b is formed of silicon similarly to the first memorychannel layer 5 a. The second memory channel layer 5 b may be formed ofa semiconductor containing silicon. The second memory channel layer 5 bis electrically connected to the connection body 2. A second core member6 b is provided so as to fill the hollow portion inside the secondmemory channel layer 5 b. The second core member 6 b is formed of,similarly to the first core member 6 a, silicon oxide and has a circularcolumnar structure with a diameter of 10 nm. The core member may be madeof any material that can fill the hollow portion, and silicon nitridemay be used as well as silicon oxide. Alternatively, the same materialas the second memory channel layer 5 b is possible. Furthermore, thehollow portion may be as it is with no member provided.

A second inter-gate insulating film 8 b in a tubular shape penetratingthrough all of the plurality of second word lines in the second stackedbody is provided so as to include the tubular second tunnel insulatingfilm 4 b on the inside. The second inter-gate insulating film 8 b has athickness of 10 nm similarly to the first inter-gate insulating film 8a, and is formed of silicon oxide. Silicon nitride may be used insteadof silicon oxide. The second inter-gate insulating film 8 b divides theplurality of second word lines WL5 to WL8 in the second stacked body.Thereby, a plurality of second floating electrodes FG5 to FG8 in a ringshape are provided along the Z direction between the second inter-gateinsulating film 8 b and the second tunnel insulating film 4 b. Each ofthe second floating electrodes FG5 to FG8 is completely insulated fromthe surroundings by the second tunnel insulating film 4 b, the over- andunderlying second interlayer insulating films 3, and the secondinter-gate insulating film 8 b.

The second word line WL5, the second inter-gate insulating film 8 b, thesecond floating electrode FG5, the second tunnel insulating film 4 b,and the second memory channel layer 5 b constitute a second memorytransistor MTr5. The second word line WL5 functions as a control gate.The second floating electrode FG5 functions as a floating gate.Electrons are injected from the second memory channel layer 5 b into thesecond floating electrode 5 and are retained therein; thereby, thesecond memory transistor functions as a memory cell having memorystorage operation. Similarly, the other second word lines WL6 to WL8,the second inter-gate insulating film 8 b, the other second floatingelectrodes FG6 to FG8, the second tunnel insulating film 4 b, and thesecond memory channel layer 5 b constitute other second memorytransistors MTr6 to MTr8. The memory transistors MTr6 to MTr8 functionas memory cells. The four second memory transistors MTr5 to MTr8 areconnected in series by the second stacked body, the second tunnelinsulating film 4 b, and the second memory channel layer 5 b, andconstitute the second columnar body MS2.

The first columnar body MS1 and the second columnar body MS2 areconnected to the connection body 2 on the substrate side by the firstmemory channel layer 5 a and the second memory channel layer 5 b beingelectrically connected to the connection body 2, as described above.

The drain-side select gate line SGD is provided on the first stackedbody via the interlayer insulating film 3. An interlayer insulating film9 is provided on the drain-side select gate line SGD. The drain-sideselect gate line SGD extends along the X direction similarly to theplurality of first word lines WL1 to WL4. A transistor hole penetratingthrough the interlayer insulating film 9 and the drain-side select gateline SGD is provided equal in number to the first memory holes in aposition corresponding to the first memory hole MH1. A first gateinsulating film 10 a in a tubular shape covering the side wall of thetransistor hole formed of the drain-side select gate line SGD and theinterlayer insulating film 9 is provided. The first gate insulating film10 a is connected to the first tunnel insulating film 4 a. A firstchannel layer 11 a is provided so as to oppose the drain-side selectgate line SGD via the first gate insulating film 10 a. The first channellayer 11 a is insulated from the drain-side select gate line SGD by thefirst gate insulating film. The first channel layer 11 a is electricallyconnected to the first memory channel layer 4 a on the substrate side.The first channel layer 11 a is electrically connected to the bit lineBL on the opposite side to the substrate. The drain-side select gateline SGD, the first gate insulating film 10 a, and the first channellayer 11 a constitute the drain-side select transistor SDTr. Theconduction and non-conduction of the first channel layer 11 a arecontrolled by the drain-side select gate line SGD.

The source-side select gate line SGS is provided on the second stackedbody via the interlayer insulating film 3. The interlayer insulatingfilm 9 is provided on the source-side select gate line SGS. Thesource-side select gate line SGS extends along the X direction similarlyto the plurality of second word lines WL5 to WL8. A transistor holepenetrating through the interlayer insulating film 9 and the source-sideselect gate line SGS is provided equal in number to the second memoryholes in a position corresponding to the second memory hole MH2. Asecond gate insulating film 10 b in a tubular shape covering the sidewall of the transistor hole formed of the source-side select gate lineSGS and the interlayer insulating film 9 is provided. The second gateinsulating film 10 b is connected to the second tunnel insulating film 4b. A second channel layer 11 b is provided so as to oppose thesource-side select gate line SGS via the second gate insulating film 10b. The second channel layer 11 b is insulated from the source-sideselect gate line SGS by the second gate insulating film 10 b. The secondchannel layer 11 b is electrically connected to the second memorychannel layer 4 b on the substrate side. The second channel layer 11 bis electrically connected to the source line SL on the opposite side tothe substrate. The source-side select gate line SGS, the second gateinsulating film 10 b, and the second channel layer 11 b constitute thesource-side select transistor SSTr. The conduction and non-conduction ofthe second channel layer 11 b are controlled by the source-side selectgate line SGS.

The drain-side select gate line SGD and the source-side select gate lineSGS are formed of, for example, conductive silicon, but may be formed ofa conductor containing silicon. Other than a conductor containingsilicon, a metal or a metal silicide may be used. The first gateinsulating film 10 a and the second gate insulating film 10 b are, forexample, silicon oxide, but silicon nitride may be used. The firstchannel layer 11 a and the second channel layer 11 b are formed of, forexample, silicon, but may be formed of a semiconductor containingsilicon.

The memory string MS is formed in the above way. The memory string MSforms a NAND flash memory including the first columnar body MS1 and thesecond columnar body MS2 connected in series by the connection body 2.

Conventional charge storage nonvolatile semiconductor memory devicesinclude a plurality of memory cells connected in series in the stackingdirection of a stacked body by a configuration in which a firstinsulating film, a charge storage layer, a second insulating film, and achannel layer are formed in a memory hole penetrating through thestacked body in which conductive layers and interlayer insulating filmsare alternately stacked. The charge storage nonvolatile semiconductormemory device performs memory storage operation by electrons beingtrapped in the charge storage layer. Since adjacent memory cells areconnected to each other by the charge storage layer, electrons trappedin each memory cell are likely to leak to an adjacent memory cell, andthe charge retention ability is not good. Furthermore, the chargestorage nonvolatile semiconductor memory device performs the erasing ofmemory by injecting holes from the channel layer into the charge storagelayer via the second insulating film. Therefore, the second insulatingfilm deteriorates rapidly, and the memory retention ability is furtherreduced. In addition, since the charge storage layer cannot storeelectrons in high density, the range in which the threshold of thememory cell can be selected is narrow. Moreover, the memory cells formedin adjacent memory holes are connected using a back gate transistor.Therefore, the structure is complicated.

In contrast, in the nonvolatile semiconductor memory device of theembodiment, as described above, the memory cell is composed of a wordline, an inter-gate insulating film, a floating electrode, a tunnelinsulating film, and a memory channel layer. The portion retaining acharge of the memory cell is formed of a conductive floating electrodeinsulated from the surroundings. Therefore, the nonvolatilesemiconductor device according to the embodiment is a floating gatenonvolatile semiconductor memory device. Thus, insulation is ensuredbetween the floating electrodes of adjacent memory cells by aninsulating film. Therefore, the nonvolatile semiconductor memory deviceaccording to the embodiment is good in charge retention ability ascompared to the charge storage nonvolatile semiconductor memory devicein which the portion retaining a charge of the memory cell is formed ofa charge storage layer.

Furthermore, in the erasing of the memory of the memory cell, thenonvolatile semiconductor memory device according to the embodimentreleases electrons from the floating electrode to the memory channellayer via the tunnel insulating film. Therefore, the nonvolatilesemiconductor memory device according to the embodiment suppresses thedeterioration of the tunnel insulating film as compared to the chargestorage nonvolatile semiconductor memory device, and therefore furtherexcels in charge retention ability. In addition, since the floatingelectrode can retain electrons in higher density than the charge storagelayer, the nonvolatile semiconductor memory device according to theembodiment allows the threshold of the memory cell to be controlled in awide range as compared to the charge storage nonvolatile semiconductormemory device. Moreover, in the nonvolatile semiconductor memory deviceaccording to the embodiment, the first columnar body MS1 and the secondcolumnar body MS2 are electrically connected by being combined by theconductive connection body 2. Therefore, the structure is simplified ascompared to the charge storage nonvolatile semiconductor memory devicein which the memory cells of adjacent memory holes are combined by aback gate transistor.

Although the word line layer WL is described using an example of n-typesilicon in the embodiment, also p-type silicon may be used. Although inthis case the threshold of the memory cell is increased because the workfunction of p-type silicon is larger than that of n-type silicon, thebarrier of the inter-gate insulating film and the tunnel insulating filmagainst the floating electrode is high. Consequently, the leakage ofelectrons from the floating electrode is suppressed, and the chargeretention ability of the floating electrode is improved. Similar effectsare obtained also by using TaN, TiN, and a metal such as W, Mo, and Ta,of which the work functions are high, in place of p-type silicon.

Next, a method for manufacturing a nonvolatile semiconductor memorydevice according to the embodiment is described using FIG. 5 to FIG. 13.FIG. 5 to FIG. 13 are schematic cross-sectional views of a main portionshowing part of the manufacturing processes of the nonvolatilesemiconductor memory device according to the first embodiment. Thedrawings are cross-sectional views as viewed from the X direction in theperspective view of FIG. 1.

As shown in FIG. 5, a trench is formed that runs from the surface of theinsulating layer 1 provided on a not-shown substrate into the insulatinglayer 1 and extends in the Y direction in the drawing. The trench isformed by, for example, RIE (reactive ion etching). Conductive siliconis buried in the trench and is formed on the entire surface of theinsulating layer 1 by CVD (chemical vapor deposition). After that, CMP(chemical mechanical polishing) is performed to planarize the surface ofthe conductive silicon until the surface of the insulating layer 1 isexposed. Consequently, the connection body 2 is formed on the surface ofthe insulating layer 1 so as to extend in the Y direction in theinsulating layer 1. Such a connection body is formed in plural on thesurface of the insulating layer 1 along the X direction perpendicular tothe Y direction.

Next, as shown in FIG. 6, on the surfaces of the connection body 2 andthe insulating layer 1, silicon oxide is film-formed by CVD to form theinterlayer insulating film 3. On the interlayer insulating film 3,n-type silicon is film-formed by CVD to form the word line layer WL. Theformation of the interlayer insulating film 3 and the formation of theword line layer WL are alternately performed to form a stacked bodyformed of the plurality of word lines WL and the plurality of interlayerinsulating films 3. In the embodiment, the stacked body includes fourword line layers WL. The total number of word line layers in the stackedbody is determined by the number of memory cells included in the firstcolumnar body MS1 and the second columnar body MS2 of the memory stringMS. Although the word line layer WL is n-type silicon in the embodiment,it is also possible to use a p-type impurity instead of an n-typeimpurity to film-form silicon and thereby form p-type silicon. The wordline layer may be formed also by performing vapor deposition of a metalsuch as tungsten (W) using a source gas of the metal material, such astungsten hexafluoride (WF₆). Furthermore, the word line layer WL may beformed of a metal silicide by vapor-depositing a metal such as Ni on thesurface of silicon and performing heat treatment after the stacked bodyis formed.

Next, as shown in FIG. 7, RIE is performed to form the first memory holeMH1 that penetrates through all of the plurality of word line layers WLin the stacked body and reaches one end of the connection body 2 and thesecond memory hole MH2 that similarly penetrates through all of the wordline layers WL in the stacked body and reaches the other end of theconnection body 2. The diameter of the memory hole is 40 nm. The firstand second memory holes MH1 and MH2 are formed in plural in the stackedbody along the X direction, and a set of the first memory hole MH1 andthe second memory hole MH2 are formed so as to be connected to both endsof the corresponding connection body 2.

The illustration of the mask used in forming the plurality of firstmemory holes MH1 and the plurality of second memory holes MH2 is omittedin FIG. 7. The mask will now be briefly described using FIGS. 8A to 8D.As shown in FIG. 8A, an insulating film M1 is formed on the surface ofthe uppermost interlayer insulating film 3 of the stacked body composedof the plurality of word line layers WL and the plurality of interlayerinsulating films 3. The insulating film M1 may be an insulator, and is,for example, silicon nitride. Also silicon oxide may be used instead ofsilicon nitride. The insulating film M1 is film-formed by, for example,CVD.

Next, as shown in FIG. 8B, RIE using a not-shown mask is performed toform a substantially circular opening in the insulating film M1. Theinterlayer insulating film 3 of the stacked body is exposed at thebottom of the opening. The diameter of the opening is R1. Next, as shownin FIG. 8C, an insulating film M1 is film-formed again by CVD on theformer insulating film M1, on the side wall of the opening of theinsulating film M1, and on the interlayer insulating film 3 exposed atthe bottom of the opening. The side wall of the opening of theinsulating film M1 shifts to the inside by an amount of the filmthickness of the film-formed insulating film M1, and the diameter of theopening becomes smaller. By the film-formation of the insulating filmM1, the opening of the insulating film M1 is made into a recess having abottom.

After that, RIE is performed on the entire surface of the insulatingfilm M1 without using a mask. Consequently, the side wall of the recessof the insulating film M1 is hardly etched, and only the upper surfaceof the insulating film M1 and the bottom of the recess of the insulatingfilm M1 are etched. The RIE is stopped when the interlayer insulatingfilm 3 of the stacked body is exposed at the bottom of the recess.Thereby, the recess of the insulating film M1 is made into an openinghaving a diameter of R2.

The accuracy of the diameter R1 of the former opening is determined bymask alignment. In conventional mask alignment technology, the accuracyis not so good when the diameter of the opening is 50 nm or less. Thus,an opening with a diameter of 50 nm or more is formed in the insulatingfilm M1 beforehand, and then the same insulating film is furtherfilm-formed, after which the insulating film film-formed on the bottomof the opening is selectively etched by RIE. Thereby, the latter openinghaving a diameter of R2 smaller than the diameter of R1 by an amount ofthe film thickness of the insulating film again film-formed is obtained.Film thickness control based on film-formation provides higher accuracythan that based on mask alignment. Therefore, when forming a mask havingan opening with a diameter smaller than 50 nm, the opening of the maskis preferably formed by the method mentioned above.

In the embodiment, the mask mentioned above is used to perform RIE toform the plurality of first memory holes MH1 and the plurality of secondmemory holes MH2 mentioned above via the opening having a diameter ofR2. The mask mentioned above is removed after the first and secondmemory holes MH1 and MH2 are formed.

Next, as shown in FIG. 9, silicon oxide, for example, is formed by CVDon the side walls and the bottoms in the first memory hole MH1 and thesecond memory hole MH2 and on the interlayer insulating film 3 of thestacked body. After that, RIE, for example, is performed to removeunnecessary silicon oxide on the bottom of the first memory hole MH1 andunnecessary silicon oxide on the bottom of the second memory hole MH2.Thereby, silicon oxide is formed only on the side walls of the firstmemory hole MH1 and the second memory hole MH2. That is, the tubularfirst tunnel insulating film 4 a formed of silicon oxide is formed onthe side wall of the first memory hole MH1, and covers the plurality ofword line layers WL. Similarly, the tubular second tunnel insulatingfilm 4 b formed of silicon oxide is formed on the side wall of thesecond memory hole MH2, and covers the plurality of word line layers WL.The tunnel insulating film 4 may be formed of silicon nitride instead ofsilicon oxide.

Next, silicon, for example, is formed by CVD on the side walls in thefirst memory hole MH1 and the second memory hole MH2 via the firsttunnel insulating film 4 a and the second tunnel insulating film 4 b, onthe connection body 2 exposed at the bottoms of the first memory holeMH1 and the second memory hole MH2, and on the interlayer insulatingfilm 3 of the stacked body. After that, RIE, for example, is performedto selectively remove unnecessary silicon on the interlayer insulatingfilm 3 of the stacked body, unnecessary silicon on the bottom of thefirst memory hole MH1, and unnecessary silicon on the bottom of thesecond memory hole MH2. Thereby, the tubular first memory channel layer5 a formed of silicon is formed on the side wall of the first memoryhole MH1 via the first tunnel insulating film 4 a. The plurality of wordline layers WL are opposed to the first memory channel layer 5 a via thefirst tunnel insulating film 4 a. The first memory channel layer 5 a iselectrically connected to the connection body 2. Similarly, the tubularsecond memory channel layer 5 b formed of silicon is formed on the sidewall of the second memory hole MH2 via the second tunnel insulating film4 b. The plurality of word line layers WL are opposed to the secondmemory channel layer 5 b via the second tunnel insulating film 4 b. Thesecond memory channel layer 5 b is electrically connected to theconnection body 2. Although in the embodiment the first memory channellayer 5 a and the second memory channel layer 5 b formed on the bottomsof the first memory hole MH1 and the second memory hole MH2 are removedby RIE to expose the connection body 2, this is not necessarily needed.

Next, silicon oxide 6, for example, is formed on the stacked body by CVDso as to be buried in the hollow portions formed inside the first memorychannel layer 5 a and the second memory channel layer 5 b. After that,CMP, for example, is performed to planarize the silicon oxide 6 down tothe uppermost interlayer insulating film 3 of the stacked body or to thesilicon oxide of the first and second tunnel insulating films 4.Consequently, the first core member 6 a and the second core member 6 bformed of silicon oxide are formed in the first memory hole MH1 and inthe second memory hole MH2, respectively. Silicon nitride may be usedinstead of silicon oxide. Alternatively, the hollow portions inside thefirst memory channel layer 5 a and the second memory channel layer 5 bmay be left as they are without forming core members.

Next, as shown in FIG. 10, by RIE using a not-shown mask, a ring-shapedfirst trench 7 a and a ring-shaped second trench 7 b are formed so as toinclude the tubular first tunnel insulating film 4 a and the tubularsecond tunnel insulating film 4 b, respectively, on the inside. Thering-shaped first trench 7 a divides the plurality of word line layersWL in the stacked body, and the plurality of ring-shaped first floatingelectrodes FG are formed between the ring-shaped first trench 7 a andthe first tunnel insulating film 4 a. Similarly, the ring-shaped secondtrench 7 b divides the plurality of word line layers WL in the stackedbody, and the plurality of ring-shaped second floating electrodes FG areformed between the ring-shaped second trench 7 b and the second tunnelinsulating film 4 b.

Next, the mask used in forming the ring-shaped first trench 7 a and thering-shaped second trench 7 b is briefly described using FIGS. 11A to11F. As shown in FIG. 11A, a substantially circular insulating film M2with a diameter larger than that of the memory hole is formed by CVD andsubsequent RIE, and the memory hole is completely covered with theinsulating film M2. The insulating film M2 is formed of, for example,silicon nitride.

Next, as shown in FIG. 11B, an insulating film M3 of a differentmaterial from the insulating film M2 is film-formed by CVD so as tocover the upper surface and the side wall of the insulating film M2 andthe upper surface of the interlayer insulating film 3 of the stackedbody. The insulating film 3 is, for example, silicon oxide. Theinsulating film M3 may be a material with a high etching selection ratioto the insulating film M2.

Next, as shown in FIG. 11C, the entire surface of the insulating film M3is etched by RIE without using a mask. Only the insulating film M3 onthe insulating film M2 and the insulating film M3 on the interlayerinsulating film 3 of the stacked body are etched, and only theinsulating film M3 on the side wall of the insulating film M2 is left ina ring shape.

Next, as shown in FIG. 11D, an insulating film M2 of the same insulatoras the insulating film M2 is film-formed by CVD so as to cover theinsulating film M2, the insulating film M3, and the interlayerinsulating film 3 of the stacked body.

Next, as shown in FIG. 11E, CMP is performed to planarize the insulatingfilm M2 until the insulating film M3 is exposed at the surface.

Next, as shown in FIG. 11F, wet etching, for example, is performed toselectively remove the insulating film M3 by etching to form a mask M2having a ring-shaped opening. When viewed from above, the tubular tunnelinsulating film 4, the memory channel 5, and the core member 6 formed inthe memory hole MH are disposed inside the ring-shaped opening. Insteadof wet etching, RIE may be used to etch the entire surface of theinsulating film M3 to form a ring-shaped opening. In this case, also theinsulating film M2 is etched; but since the etching rate of theinsulating film M2 is slower than the etching rate of the insulatingfilm M3, substantially the insulating film M3 is selectively etched. Thestacked body is etched by RIE via the opening of the mask M2, and thering-shaped first trench 7 a and the ring-shaped second trench 7 bdescribed above are formed.

Next, as shown in FIG. 12, silicon oxide, for example, is film-formed byCVD so as to be buried in the ring-shaped first trench 7 a and thering-shaped second trench 7 b. After that, CMP is performed to planarizethe silicon oxide. Thus, the first inter-gate insulating film 8 a isformed in the ring-shaped first trench 7 a, and the second inter-gateinsulating film 8 b is formed in the ring-shaped second trench 7 b.Consequently, the floating electrodes FG1 to FG4 are completelyinsulated from the surroundings by the first inter-gate insulating film,the over- and underlying interlayer insulating films 3, and the firsttunnel insulating film. Similarly, the floating electrodes FG5 to FG8are completely insulated from the surroundings by the second inter-gateinsulating film, the over- and underlying interlayer insulating films 3,and the second tunnel insulating film.

Next, as shown in FIG. 13, a select gate line layer SG is film-formed byCVD on the entire surface of the interlayer insulating film 3 of thestacked body. The select gate line layer SG is formed of, for example,n-type silicon. The select gate line layer SG may be formed of p-typesilicon. The select gate line layer SG may be formed of a conductorcontaining silicon. Other than a conductor containing silicon, a metalor a metal silicide may be used. The interlayer insulating film 9 isfilm-formed on the select gate line layer SG by CVD. The interlayerinsulating film 9 is, for example, silicon oxide. Instead of siliconoxide, silicon nitride or other insulators may be used.

Next, RIE is performed to form a transistor hole that penetrates throughthe interlayer insulating film 9 and the select gate line layer SG andexposes the first tunnel insulating film 4 a and the first memorychannel layer 5 a. Similarly, a transistor hole that penetrates throughthe interlayer insulating film 9 and the select gate line layer SG andexposes the second tunnel insulating film 4 b and the second memorychannel layer 5 b is formed. These transistor holes are formed tocorrespond to the positions of the first memory hole MH1 and the secondmemory hole MH2.

Next, as shown in FIG. 3, silicon oxide, for example, is film-formed byCVD on the select gate line layer SG and the interlayer insulating film9 exposed at the side walls in the transistor holes, and on the firsttunnel insulating film 4 a, the first memory channel layer 5 a, thefirst core member 6 a, the second tunnel insulating film 4 b, the secondmemory channel layer 5 b, and the second core member 6 b that areexposed at the bottoms of the transistor holes. After that, RIE isperformed without using a mask to remove at least the silicon oxide onthe first memory channel layer 5 a, on the first core member 6 a, on thesecond memory channel layer 5 b, and on the second core member 6 b.

Next, silicon, for example, is film-formed by CVD so as to be buried inthe transistor holes via the silicon oxide mentioned above. After that,CMP is performed to planarize the silicon and the silicon oxidementioned above until the interlayer insulating film 9 is exposed.Consequently, the tubular first gate insulating film 10 a that coversthe select gate line layer SG and the interlayer insulating film 9exposed at the side wall of the transistor hole and is connected to thefirst tunnel insulating film 4 a, and the tubular second gate insulatingfilm 10 b that similarly covers the select gate line layer SG and theinterlayer insulating film 9 exposed at the side wall of the transistorhole and is connected to the second tunnel insulating film 4 b areformed. At the same time, the first channel layer 11 a and the secondchannel layer 11 b formed of silicon are formed in the transistor holesvia the first gate insulating film 10 a and the second gate insulatingfilm 10 b.

The first gate insulating film 10 a insulates the select gate line layerSG from the first channel layer 11 a and the first memory channel layer5 a. The first channel layer 11 a is opposed to the drain-side selectgate line SGD via the first gate insulating film 10 a. Similarly, thesecond gate insulating film 10 b insulates the select gate line layer SGfrom the second channel layer 11 b and the second memory channel layer 5b. The second channel layer 11 b is opposed to the source-side selectgate line SGS via the second gate insulating film 10 b.

Next, an isolation trench that divides all of the plurality of word linelayers WL in the stacked body together with the select gate line layerSG is formed between the first inter-gate insulating film 8 a and thesecond inter-gate insulating film 8 b by, for example, RIE.Consequently, the stacked body is divided into the first stacked bodyand the second stacked body. The plurality of word lines in the stackedbody are divided into the plurality of first word lines WL1 to WL4 andthe plurality of second word lines WL5 to WL8. The select gate linelayer SG is divided into the drain-side select gate line SGD and thesource-side select gate line SGS.

Thus, the first word line WL1, the first inter-gate insulating film 8 a,the first floating electrode FG1, the first tunnel insulating film 4 a,and the first memory channel layer 5 a constitute one memory transistorMTr1. The plurality of first word lines WL1 to WL4, the first inter-gateinsulating film 7 a, the plurality of first floating electrodes FG1 toFG4, the first tunnel insulating film 4 a, and the first memory channellayer 5 a constitute the plurality of memory transistors MTr1 to MTr4.The plurality of memory transistors MTr1 to MTr4 are connected in seriesvia the first memory channel layer 5 a, and constitute the firstcolumnar body MS1.

Similarly, the second word line WL5, the second inter-gate insulatingfilm 8 b, the second floating electrode FG5, the second tunnelinsulating film 4 b, and the second memory channel layer 5 b constituteone memory transistor MTr5. The plurality of second word lines WL5 toWL8, the second inter-gate insulating film 7 b, the plurality of secondfloating electrodes FG5 to FG8, the second tunnel insulating film 4 b,and the second memory channel layer 5 b constitute the plurality ofmemory transistors MTr5 to MTr8. The plurality of memory transistorsMTr5 to MTr8 are connected in series via the second memory channel layer5 b, and constitute the second columnar body MS2.

The first columnar body and the second columnar body are connected bythe connection body 2. The connection body 2 is electrically connectedto the first memory channel layer 5 a at one end of the connection body2, and is electrically connected to the second memory channel layer 5 bat the other end.

The drain-side select transistor SDTr is composed of the drain-sideselect gate line SGD, the first gate insulating film 10 a, and the firstchannel layer 11 a. The source-side select transistor SSTr is composedof the source-side select gate line SGS, the second gate insulating film10 b, and the second channel layer 11 b. The drain-side selecttransistor SDTr is connected to the first columnar body MS1 on theopposite side to the substrate. One end of the first channel layer 11 aof the drain-side select transistor SDTr is electrically connected tothe first memory channel layer 5 a. The source-side select transistorSSTr is connected to the second columnar body MS2 on the opposite sideto the substrate. One end of the second channel layer 11 b of thesource-side select transistor SSTr is electrically connected to thesecond memory channel layer 5 b.

Although illustration and a detailed description are omitted, afterthat, the plurality of bit lines BL and the plurality of source lines SLare formed on the interlayer insulating film 9 via an interlayerinsulating film by using common process technology. The other end of thefirst channel layer 11 a of the drain-side select transistor SDTr iselectrically connected to the bit line BL. The other end of the secondchannel layer 11 b of the source-side select transistor SSTr iselectrically connected to the source line SL. Thus, the connection body2, the first columnar body MS1, the second columnar body MS2, thedrain-side select transistor SDTr, and the source-side select transistorSSTr constitute the memory string MS. Memory strings MS are arranged inan array configuration in the memory cell array in the nonvolatilesemiconductor memory device.

In the embodiment mentioned above, silicon oxide is film-formed byreduced pressure (1 to 10 Torr) CVD of 300 to 900° C. using, forexample, silane (SiH₄) and oxygen (O₂) gas as the source material. Asthe source material of silicon, disilane (Si₂H₆) or dichlorosilane(SiCl₂H₂) may be used instead of silane. As the source material ofoxygen, also dinitrogen monoxide (N₂O) or nitrogen monoxide (NO) may beused. Silicon is film-formed by reduced pressure (1 to 10 Torr) CVD of300 to 600° C. using silane (SiH₄), disilane (Si₂H₆), or dichlorosilane(SiCl₂H₂) as the source material. When p-type silicon is film-formed,for example, boron trichloride (BCl₃) is used as the source material ofthe p-type impurity. When n-type silicon is film-formed, for example,phosphine (PH₃) is used as the source material of the n-type impurity.The word line layer WL, the connection body 2, and the memory channellayer 5 may be formed of silicon germanium (SiGe) instead of silicon.

In the embodiment, a memory hole is formed in the stacked body, and atunnel insulating film, a memory channel layer, and a core member areformed in the memory hole, after which a ring-shaped trench is formedand an inter-gate insulating film is formed in the ring-shaped trench.However, as a matter of course it is also possible to form a ring-shapedtrench and form an inter-gate insulating film in the ring-shaped trenchearlier, and then form a memory hole and form a tunnel insulating film,a memory channel layer, and a core member in the memory hole.

As described above, the nonvolatile semiconductor memory deviceaccording to the embodiment is a floating gate nonvolatile semiconductormemory device with a simplified structure. Thereby, as described above,a floating gate nonvolatile semiconductor memory device can be providedby relatively easy processes without performing complicatedmanufacturing processes. That is, a floating gate nonvolatilesemiconductor memory device that can be easily manufactured and has ahigh bit density and high charge retention ability can be provided.

Second Embodiment

A nonvolatile semiconductor memory device according to a secondembodiment will now be described using FIG. 14. FIG. 14 is a schematiccross-sectional view of a main portion of the nonvolatile semiconductormemory device according to the second embodiment, and is across-sectional view as viewed from the X direction in the perspectiveview of FIG. 1. Components of the same configuration as theconfiguration described in the first embodiment are marked with the samereference numerals or symbols, and a description thereof is omitted.Differences from the first embodiment are mainly described.

In the memory string MS of the nonvolatile semiconductor memory deviceaccording to the embodiment, the plurality of word lines WL1 to WL8 areformed of n-type silicon, but a plurality of floating electrodes FG1P toFG8P are formed of p-type silicon. In this respect, the memory string MSof the nonvolatile semiconductor memory device according to theembodiment differs from the memory string MS of the nonvolatilesemiconductor memory device according to the first embodiment.

The floating electrode FG is formed of p-type silicon, of which the workfunction is higher than that of n-type silicon forming the word line WL.By the work function being high, the barrier of the tunnel insulatingfilm 4, the inter-gate insulating film 8, and the interlayer insulatingfilm 3 against the floating electrode FG is high. Therefore, the leakageof electrons injected in the floating electrode is suppressed. Thus, inthe nonvolatile semiconductor memory device according to the embodiment,the charge retention ability is further improved as compared to thenonvolatile semiconductor memory device according to the firstembodiment.

Furthermore, only the floating electrode FG is formed of p-type silicon,and the word line WL is formed of n-type silicon; thereby, an increasein the threshold of the memory transistor MTr is prevented. This isbecause an increase in the work function of the word line leads to anincrease in the threshold of the memory transistor MTr. For the gateelectrode of a MOSFET, when it is formed of a material of a higher workfunction, the charge retention ability is improved, but the threshold isincreased. Conversely, for the gate electrode of a MOSFET, when it isformed of a material of a lower work function, the threshold isdecreased, but the charge retention ability is degraded.

In the memory string MS of the nonvolatile semiconductor memory deviceaccording to the embodiment, the word line WL is formed of n-typesilicon, and only the floating electrode FG is formed of p-type silicon.Thereby, the nonvolatile semiconductor memory device according to theembodiment has a low threshold and further increased charge retentionability as compared to the nonvolatile semiconductor memory deviceaccording to the first embodiment.

The nonvolatile semiconductor memory device according to the embodimentis, similarly to the nonvolatile semiconductor memory device accordingto the first embodiment, a floating gate nonvolatile semiconductormemory device in which the memory cell is formed of a word line, aninter-gate insulating film, a floating electrode, a tunnel insulatingfilm, and a memory channel layer. Therefore, the nonvolatilesemiconductor memory device according to the embodiment is good incharge retention ability as compared to a charge storage nonvolatilesemiconductor memory device in which the portion retaining a charge ofthe memory cell is formed of a charge storage layer.

In the erasing of the memory of the memory cell, electrons are releasedfrom the floating electrode to the memory channel layer via the tunnelinsulating film. Therefore, the deterioration of the tunnel insulatingfilm is suppressed, and thus the memory retention ability is furtherimproved as compared to the charge storage nonvolatile semiconductormemory device. In addition, since the floating electrode can retainelectrons in higher density than the charge storage layer, thenonvolatile semiconductor memory device according to the embodimentallows the threshold of the memory cell to be controlled in a wide rangeas compared to the charge storage nonvolatile semiconductor memorydevice. Moreover, in the nonvolatile semiconductor memory deviceaccording to the embodiment, the first columnar body MS1 and the secondcolumnar body MS2 are electrically connected by being combined by theconductive connection body 2. Therefore, the structure is simplified ascompared to the charge storage nonvolatile semiconductor memory devicein which the memory cells of adjacent memory holes are combined by aback gate transistor.

Next, a method for manufacturing a nonvolatile semiconductor memorydevice according to the embodiment is described using FIG. 15 to FIG.17. FIG. 15 to FIG. 17 are schematic cross-sectional views of a mainportion showing part of the manufacturing processes of the nonvolatilesemiconductor memory device according to the embodiment.

Similarly to the first embodiment, as shown in FIG. 6, a stacked bodycomposed of the plurality of word line layers WL and the plurality ofinterlayer insulating films 3 is formed on the connection body 2 and onthe insulating layer 1. After that, as shown in FIG. 15, RIE using themask shown in FIG. 11F is performed to form the ring-shaped first trench7 a and the ring-shaped second trench 7 b. The ring-shaped first andsecond trenches 7 penetrate through all of the plurality of word linesWL in the stacked body, similarly to the first embodiment. After that,similarly to the first embodiment, the tubular first inter-gateinsulating film 8 a is formed in the ring-shaped first trench 7 a, andthe tubular second inter-gate insulating film 8 b is formed in thering-shaped second trench 7 b. In the embodiment, unlike the firstembodiment, the first inter-gate insulating film 8 a and the secondinter-gate insulating film 8 b are formed earlier than the first tunnelinsulating film 4 a, the first memory channel layer 5 a, the first coremember 6 a, the second tunnel insulating film 4 b, the second memorychannel layer 5 b, and the second core member 6 b.

Next, as shown in FIG. 16, similarly to the first embodiment, RIE usingthe mask shown in FIG. 8D is performed to form the first memory hole MH1and the second memory hole MH2. The first memory hole MH1 and the secondmemory hole MH2 penetrate through the stacked body and reaches both endsof the connection body 2. Consequently, the plurality of first floatingelectrodes FG1P to FG4P separated from the plurality of word lines WLare formed between the first memory hole MH1 and the first inter-gateinsulating film 8 a. Similarly, the plurality of second floatingelectrodes FG5P to FG8P separated from the plurality of word lines WLare formed between the second memory hole MH2 and the second inter-gateinsulating film 8 b.

After that, by performing heat treatment in a gas atmosphere containingboron trichloride (BCl₃), boron (B) is vapor-diffused into the pluralityof first floating electrodes FG1P to FG4P exposed at the side wall ofthe first memory hole MH1 and the plurality of second floatingelectrodes FG5P to FG8P exposed at the side wall of the second memoryhole MH2. Consequently, the conductivity type of the plurality of firstfloating electrodes FG1P to FG4P and the plurality of second floatingelectrodes FG5P to FG8P is reversed from n-type silicon to p-typesilicon. The first inter-gate insulating film 8 a and the secondinter-gate insulating film 8 b block the diffusion of boron from thefloating electrodes FG1P to FG8P to the word line layers WL. Thereby,only the plurality of floating electrodes can be selectively convertedinto p-type silicon.

At this time, the surface of the connection body 2 exposed at thebottoms of the first memory hole MH1 and the second memory hole MH2becomes p-type silicon. However, details being omitted, the formation ofp-type silicon can be suppressed by etching-removing the portion thathas become p-type silicon by RIE, by ion-implanting an n-type impurityinto the portion that has become p-type silicon, or by like methods.

Next, as shown in FIG. 17, similarly to the first embodiment, thetubular first tunnel insulating film 4 a, the tubular first memorychannel layer 5 a, and the first core member 6 a are formed in the firstmemory hole. The tubular second tunnel insulating film 4 b, the tubularsecond memory channel layer 5 b, and the second core member 6 b areformed in the second memory hole. After that, similar manufacturingprocesses to the first embodiment are performed. Thus, the nonvolatilesemiconductor memory device according to the embodiment including thememory string MS shown in FIG. 14 is formed.

Also in the embodiment, a floating gate nonvolatile semiconductor memorydevice can be provided by relatively easy processes. That is, a floatinggate nonvolatile semiconductor memory device that can be easilymanufactured and has a high bit density and high charge retentionability can be provided.

Third Embodiment

A nonvolatile semiconductor memory device according to a thirdembodiment is described using FIG. 18. FIG. 18 is a schematiccross-sectional view of a main portion of the nonvolatile semiconductormemory device according to the third embodiment, and is across-sectional view as viewed from the X direction in the perspectiveview of FIG. 1. Components of the same configuration as theconfiguration described in the second embodiment are marked with thesame reference numerals or symbols, and a description thereof isomitted. Differences from the second embodiment are mainly described.

In the memory string MS of the nonvolatile semiconductor memory deviceaccording to the embodiment, the plurality of word lines WL1 to WL8 areformed of n-type silicon, but a plurality of floating electrodes FG1S toFG8S are formed of a metal silicide. Ni silicide is used as an exampleof the metal silicide, but other metal silicides may be used. In thisrespect, the memory string MS of the nonvolatile semiconductor memorydevice according to the embodiment differs from the memory string MS ofthe nonvolatile semiconductor memory device according to the secondembodiment.

In the embodiment, as described later, in the process of thesilicidation of the plurality of floating electrodes FG1S to FG8S, oneend and the other end of the connection body 2 exposed at the bottom ofthe first memory hole MH1 and the bottom of the second memory hole MH2are made into a metal silicide simultaneously. Therefore, the electricalconnection between the first memory channel layer 5 a and the connectionbody 2 is low resistive as compared to the case of the secondembodiment. Similarly, the electrical connection between the secondmemory channel layer 5 b and the connection body 2 is low resistive.Also in this respect, the memory string MS of the nonvolatilesemiconductor memory device according to the embodiment differs from thememory string MS of the nonvolatile semiconductor memory deviceaccording to the second embodiment. In the embodiment, one end and theother end of the connection body 2 are silicided, and the other portionsremain n-type silicon. However, silicidation may be promoted to make thewhole connection body 2 a metal silicide. In this case, the resistanceof the connection body 2 is further reduced.

Metal silicides have a large work function as compared to n-typesilicon, and have a substantially equal work function to p-type silicon.Consequently, the nonvolatile semiconductor memory device according tothe embodiment suppresses the leakage of electrons injected in thefloating electrode FG and therefore has high charge retention ability,similarly to the nonvolatile semiconductor memory device according tothe second embodiment.

Furthermore, only the floating electrode FG is formed of a metalsilicide, and the word line WL is formed of n-type silicon; thereby, anincrease in the threshold of the memory transistor MTr is prevented.This is because an increase in the work function of the word line leadsto an increase in the threshold of the memory transistor MTr. For thegate electrode of a MOSFET, when it is formed of a material of a higherwork function, the charge retention ability is improved, but thethreshold is increased. Conversely, for the gate electrode of a MOSFET,when it is formed of a material of a lower work function, the thresholdis decreased, but the charge retention ability is degraded.

In the memory string MS of the nonvolatile semiconductor memory deviceaccording to the embodiment, the word line WL is formed of n-typesilicon, and only the floating electrode FG is formed of a metalsilicide. Thereby, the nonvolatile semiconductor memory device accordingto the embodiment has a low threshold and high charge retention abilitysimilarly to the nonvolatile semiconductor memory device according tothe second embodiment.

The nonvolatile semiconductor memory device according to the embodimentis a floating gate nonvolatile semiconductor memory device in which thememory cell is formed of a word line, an inter-gate insulating film, afloating electrode, a tunnel insulating film, and a memory channellayer, similarly to the nonvolatile semiconductor memory deviceaccording to the second embodiment. Therefore, the nonvolatilesemiconductor memory device according to the embodiment is good incharge retention ability as compared to a charge storage nonvolatilesemiconductor memory device in which the portion retaining a charge ofthe memory cell is formed of a charge storage layer.

In the erasing of the memory of the memory cell, electrons are releasedfrom the floating electrode to the memory channel layer via the tunnelinsulating film. Therefore, the deterioration of the tunnel insulatingfilm is suppressed, and thus the charge retention ability is furtherimproved as compared to the charge storage nonvolatile semiconductormemory device. In addition, since the floating electrode can retainelectrons in higher density than the charge storage layer, thenonvolatile semiconductor memory device according to the embodimentallows the threshold of the memory cell to be controlled in a wide rangeas compared to the charge storage nonvolatile semiconductor memorydevice. Moreover, in the nonvolatile semiconductor memory deviceaccording to the embodiment, the first columnar body MS1 and the secondcolumnar body MS2 are electrically connected by being combined by theconductive connection body 2. Therefore, the structure is simplified ascompared to the charge storage nonvolatile semiconductor memory devicein which the memory cells of adjacent memory holes are combined by aback gate transistor.

Next, a method for manufacturing a nonvolatile semiconductor memorydevice according to the embodiment is described using FIG. 19 to FIG.20. FIG. 19 to FIG. 20 are schematic cross-sectional views of a mainportion showing part of the manufacturing processes of the nonvolatilesemiconductor memory device according to the embodiment.

As shown in FIG. 19, similarly to the second embodiment, after the firstinter-gate insulating film 8 a and the second inter-gate insulating film8 b are formed, the first memory hole MH1 and the second memory hole MH2are formed by RIE. After that, a nickel (Ni) layer 14 is film-formed by,for example, vapor deposition on the plurality of word line layers WLand the plurality of interlayer insulating films 3 exposed at the sidewall of the first memory hole MH1, and on one end of the connection body2 exposed at the bottom of the first memory hole. At the same time, thenickel (Ni) layer 14 is film-formed on the plurality of word line layersWL and the plurality of interlayer insulating films 3 exposed at theside wall of the second memory hole MH2, and on the other end of theconnection body 2 exposed at the bottom of the second memory hole.

After that, by performing heat treatment, as shown in FIG. 20, theplurality of first floating electrodes FG1S to FG4S and the plurality ofsecond floating electrodes FG5S to FG8S are made into nickel silicide.Here, the first inter-gate insulating film 8 a exists between theplurality of first floating electrodes FG1S to FG4S and the plurality ofword line layers WL, and the second inter-gate insulating film 8 bexists between the plurality of second floating electrodes FG5S to FG8Sand the plurality of word line layers WL. The first inter-gateinsulating film 8 a and the second inter-gate insulating film 8 b blockthe word line layer WL being made into a metal silicide. Consequently,the plurality of word line layers WL keep the state of n-type silicon,and only the plurality of first floating electrodes FG1S to FG4S and theplurality of second floating electrodes FG5S to FG8S are selectivelymade into nickel silicide.

By the heat treatment mentioned above, one end of the connection body 2becomes nickel silicide at the bottom of the first memory hole MH1, andthe other end of the connection body 2 becomes nickel silicide at thebottom of the second memory hole MH2. Alternatively, as a matter ofcourse it is also possible to advance silicidation further by adjustingthe temperature or the time of heat treatment and make the wholeconnection body 2 nickel silicide. Alternatively, as a matter of courseit is also possible to remove the nickel layer 14 at the bottoms of thefirst memory hole MH1 and the second memory hole MH2 before the heattreatment for conversion into a metal silicide and thereby prevent bothends of the connection body 2 mentioned above from being made intonickel silicide. Making at least part of the connection body 2 intonickel silicide is advantageous in that the resistance of the connectionbody 2 is reduced.

After that, similar processes to the second embodiment are performed.Thus, the nonvolatile semiconductor memory device according to theembodiment including the memory string MS shown in FIG. 18 is provided.

Also in the embodiment, a floating gate nonvolatile semiconductor memorydevice can be provided by relatively easy processes. That is, a floatinggate nonvolatile semiconductor memory device that can be easilymanufactured and has a high bit density and high charge retentionability can be provided.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the inventions.

1. (canceled)
 2. A nonvolatile semiconductor memory device, comprising:a plurality of first memory cells stacked in a first direction andelectrically connected in series; a plurality of second memory cellsstacked in the first direction and electrically connected in series, theplurality of second memory cells being provided beside the plurality offirst memory cells; and a connection member extending in a seconddirection and being connected to one end of the plurality of firstmemory cells and one end of the plurality of second memory cells, thesecond direction being orthogonal to the first direction, the pluralityof first memory cells including a first semiconductor body extending inthe first direction, a plurality of first floating electrodes providedon a side surface of the first semiconductor body interposed a firstinsulating layer, the plurality of first floating electrodes beingstacked in the first direction, and a plurality of first conductivelayers stacked in the first direction, one of the first conductivelayers being provided on a side surface of one of the first floatingelectrodes interposed a second insulating layer, the plurality of secondmemory cells including a second semiconductor body extending in thefirst direction and being provided beside the first semiconductor body,a plurality of second floating electrodes provided on a side surface ofthe second semiconductor body interposed a third insulating layer, theplurality of second floating electrodes being stacked in the firstdirection, and a plurality of second conductive layers stacked in thefirst direction, one of the second conductive layers being provided on aside surface of one of the second floating electrodes interposed afourth insulating layer, and the connection member including metalsilicide and being formed as a body different from the firstsemiconductor body and the second semiconductor body.
 3. The deviceaccording to claim 2, wherein the first conductive layers and the secondconductive layers include silicon.
 4. The device according to claim 2,further comprising: a first member provided inside the firstsemiconductor body, the first semiconductor body having a first tubularstructure and the first member having a columnar structure surrounded bythe first tubular structure; and a second member provided inside thesecond semiconductor body, the second semiconductor body having a secondtubular structure and the second member having a columnar structuresurrounded by the second tubular structure.
 5. The device according toclaim 4, wherein the first member and the second member include siliconoxide.
 6. The device according to claim 4, wherein each of the firstfloating electrodes and the second floating electrodes has a ring shape.7. The device according to claim 4, further comprising: a first selecttransistor including a first select gate electrode and a thirdsemiconductor body extending in the first direction and connected to thefirst semiconductor body; and a second select transistor including asecond select gate electrode and a fourth semiconductor body extendingin the first direction and connected to the second semiconductor body,the first select transistor being provided above the first memory cells,the second select transistor being provided above the second memorycells, and an upper end of the first member being in a height not higherthan a lower surface of the first select gate electrode and an upper endof the second member being in a height not higher than a lower surfaceof the second select gate electrode.
 8. The device according to claim 7,wherein the upper end of the first member is in contact with the thirdsemiconductor body and the upper end of the second member is in contactwith the fourth semiconductor body.
 9. The device according to claim 7,wherein the first select gate electrode overlaps with the first floatingelectrodes and the first conductive layers when projected from the firstdirection and the second select gate electrode overlaps with the secondfloating electrodes and the second conductive layers when projected fromthe first direction.
 10. A nonvolatile semiconductor memory devicecomprising: a plurality of first memory cells stacked in a firstdirection and electrically connected in series; the first memory cellsincluding: a first semiconductor body extending in the first direction;a plurality of first floating electrodes provided on a side surface ofthe first semiconductor body interposed a first insulating layer, theplurality of first floating electrodes being stacked in the firstdirection; and a plurality of first conductive layers stacked in thefirst direction, one of the first conductive layers being provided on aside surface of one of the first floating electrodes interposed a secondinsulating layer; a plurality of second memory cells stacked in thefirst direction and electrically connected in series, the second memorycells being provided beside the first memory cells; the second memorycells including: a second semiconductor body extending in the firstdirection and being provided beside the first semiconductor body; aplurality of second floating electrodes provided on a side surface ofthe second semiconductor body interposed a third insulating layer, theplurality of second floating electrodes being stacked in the firstdirection; and a plurality of second conductive layers stacked in thefirst direction, one of the second conductive layers being provided on aside surface of one of the second floating electrodes interposed afourth insulating layer; and a silicide-containing connection memberincluding metal silicide, the silicide-containing connection memberbeing formed on an insulating layer provided above a substrate and beingconnected to one end of the first memory cells and one end of the secondmemory cells, the first semiconductor body and the second semiconductorbody being obtained by: forming a first hole and a second hole extendingin the first direction through a stacked body in which the first memorycells and the second memory cells are to be formed to reach thesilicide-containing connection member below the stacked body; anddepositing a semiconductor film in the first hole and the second hole,the semiconductor film being formed on the silicide-containingconnection member exposed at bottoms of the first hole and the secondhole.
 11. The device according to claim 10, wherein the first conductivelayers and the second conductive layers include silicon.
 12. The deviceaccording to claim 10, further comprising: a first member providedinside the first semiconductor body, the first semiconductor body havinga first tubular structure and the first member having a columnarstructure surrounded by the first tubular structure; and a second memberprovided inside the second semiconductor body, the second semiconductorbody having a second tubular structure and the second member having acolumnar structure surrounded by the second tubular structure.
 13. Thedevice according to claim 12, wherein the first members and the secondmembers include silicon oxide.
 14. The device according to claim 12,wherein each of the first floating electrodes and the second floatingelectrodes has a ring shape.
 15. The device according to claim 12,further comprising: a first select transistor including a first selectgate electrode and a third semiconductor body extending in the firstdirection and connected to the first semiconductor body; and a secondselect transistor including a second select gate electrode and a fourthsemiconductor body extending in the first direction and connected to thesecond semiconductor body, the first select transistor being providedabove the first memory cells, the second select transistor beingprovided above the second memory cells, and an upper end of the firstmember being in a height not higher than a lower surface of the firstselect gate electrode and an upper end of the second member being in aheight not higher than a lower surface of the second select gateelectrode.
 16. The device according to claim 15, wherein the upper endof the first member is in contact with the third semiconductor body andthe upper end of the second member is in contact with the fourthsemiconductor body.
 17. The device according to claim 15, wherein thefirst select gate electrode overlaps with the first floating electrodesand the first conductive layers when projected from the first directionand the second select gate electrode overlaps with the second floatingelectrodes and the second conductive layers when projected from thefirst direction.
 18. A method of manufacturing a nonvolatilesemiconductor memory device, the device including: a plurality of firstmemory cells stacked in a first direction and electrically connected inseries; the first memory cells including: a first semiconductor bodyextending in the first direction; a plurality of first floatingelectrodes provided on a side surface of the first semiconductor bodyinterposed a first insulating layer, the first floating electrodes beingstacked in the first direction; a plurality of first conductive layersstacked in the first direction, one of the first conductive layers beingprovided on a side surface of one of the first floating electrodesinterposed a second insulating layer; a plurality of second memory cellsstacked in the first direction and electrically connected in series, thesecond memory cells being provided beside the first memory cells; thesecond memory cells including: a second semiconductor body extending inthe first direction and being provided beside the first semiconductorbody; a plurality of second floating electrodes provided on a sidesurface of the second semiconductor body interposed a third insulatinglayer, the plurality of second floating electrodes being stacked in thefirst direction; a plurality of second conductive layers stacked in thefirst direction, one of the second conductive layers being provided on aside surface of one of the second floating electrodes interposed afourth insulating layer; and a silicide-containing connection memberincluding metal silicide, the silicide-containing connection memberbeing connected to one end of the first memory cells and one end of thesecond memory cells, the method comprising: forming thesilicide-containing connection member on an insulating layer providedabove a substrate; forming a stacked body in which the first memorycells and the second memory cells being to be formed above thesilicide-containing connection member; the stacked body including aplurality of conductors stacked in the first direction, the firstconductive layers and the second conductive layers being composed of theconductors; forming a first hole and a second hole extending in thefirst direction through the stacked body and reaching thesilicide-containing connection member; and depositing a semiconductorfilm in the first hole and the second hole to form the firstsemiconductor body and the second semiconductor body, the semiconductorfilm being formed on the silicide-containing connection member exposedat bottoms of the first hole and the second hole.
 19. The methodaccording to claim 18, further comprising: forming a first coreinsulator and a second core insulator subsequent to depositing thesemiconductor film in the first hole and the second hole.
 20. The methodaccording to claim 19, wherein the forming the first core insulator andthe second core insulator includes depositing silicon oxide in the firsthole and the second hole.
 21. The method according to claim 18, whereinforming the stacked body includes alternately stacking silicon oxide andn-type silicon above the silicide-containing connection member.